MeiVac MAK Sputter Deposition Components
MeiVac is a leading manufacturer of planar magnetron sputter cathodes. Noted for its simplicity, ease of use, and resulting high reliability, the MAK sputter source has been designed to present the smallest profile possible and deliver higher deposition rates than any comparable sputter sources. MeiVac thin film sputter deposition products are the right choice for your process with a full range of standard and custom configurations.
BROCHURE
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Select a MAK Sputter Deposition Cathode Matching Your Requirements
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Target Diameter
Mount Type
| Image | Part No | Target Diameter | Mount | Specification |
|---|---|---|---|---|
 | L130A01CF | 1.3" (33.0mm) | flange | View Details |
| L130A01FM | 1.3" (33.0mm) | flexmount | View Details |
 | L130A01H | 1.3" (33.0mm) | horizontal | View Details |
| L130A01 | 1.3" (33.0mm) | vertical | View Details |
 | L200A01CF | 2.0" (50.4mm) | flange | View Details |
 | L200A01FM | 2.0" (50.4mm) | flexmount | View Details |
 | L200A01H | 2.0" (50.4mm) | horizontal | View Details |
 | L200A01 | 2.0" (50.4mm) | vertical | View Details |
| L300A01CF | 3.0" (76.2mm) | flange | View Details |
| L300A01FM | 3.0" (76.2mm) | flexmount | View Details |
| L300A01H | 3.0" (76.2mm) | horizontal | View Details |
| L300A01 | 3.0" (76.2mm) | vertical | View Details |
| L400A01CF | 4.0" (100.8mm) | flange | View Details |
| L400A01FM | 4.0" (100.8mm) | flexmount | View Details |
| L400A01H | 4.0" (100.8mm) | horizontal | View Details |
| L400A01 | 4.0" (100.8mm) | vertical | View Details |
| L600A01CF | 6.0" (152.4mm) | flange | View Details |
| L600A01FM | 6.0" (152.4mm) | flexmount | View Details |
| L600A01H | 6.0" (152.4mm) | horizontal | View Details |
| L600A01 | 6.0" (152.4mm) | vertical | View Details |
