3.0″ MAK Sputter Source Flexmount (adjustable) mount

Part Number: L300A01FM

Description

Ferrotec Meivac Flexmount (+/- 45 degree angular adjustable) sputter sources are noted for simplicity, ease of use, and resulting high reliability, the MAK sputter source has been designed to present the smallest profile possible and deliver higher deposition rates than any comparable sputter sources.

Specifications

Target Diameter

3.0" (76.2mm)

Magnets

Nd/FeB

Max Dc Power

2000W

Max RF Power

750W

Cathode Voltage (v)

200-1000

Max Discharge Current

5.0 A

Pressure Range (mtorr)

0.5 – 600

Water Flow Rate

0.8 gpm

Min CF Flange Size

6.0" CF

Dimensions

Dimension

Inches

A

Ø 3.38

B

4.35

B-2

0.66

C

Ø 2.25

D

12

D-2

4.5

E

Ø 0.75

F

2.3

Ordering

Ordering Information for Model L300A01FM

If you have questions about pricing and availability, need more information about Ferrotec’s MeiVac Vari-Q throttle valve model L300A01FM, or if you have other requirements, you can submit your request using the form or contact your Ferrotec representative directly.

Please Contact Me Regarding Ferrotec Model Number L300A01FM

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Description

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