6.0″ MAK Sputter Source Horizontal (rt. angle) mount

Part Number: L600A01H

Description

Ferrotec Meivac Horizontal (rt. angle) mount sputter sources are noted for simplicity, ease of use, and resulting high reliability, the MAK sputter source has been designed to present the smallest profile possible and deliver higher deposition rates than any comparable sputter sources.

Specifications

Target Diameter

6.0" (152.4mm)

Magnets

Nd/FeB

Max Dc Power

6000W

Max RF Power

2000W

Cathode Voltage (v)

200-1000

Max Discharge Current

10.0 A

Pressure Range (mtorr)

0.5 – 600

Water Flow Rate

2.0 gpm

Min CF Flange Size

10.0" CF

Dimensions

Dimension

Inches

A

Ø 6.55

B

6.75

B-2

*

C

Ø 4.50

D

12

D-2

4.5

E

Ø 1.25

F

2.3

Ordering

Ordering Information for Model L600A01H

If you have questions about pricing and availability, need more information about Ferrotec’s MeiVac Vari-Q throttle valve model L600A01H, or if you have other requirements, you can submit your request using the form or contact your Ferrotec representative directly.

Please Contact Me Regarding Ferrotec Model Number L600A01H

Use this form to submit your L600A01H inquiry directly to Ferrotec. If you have special requirements or need specific customizations, please include the details in your description.

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