MAK Sputter Deposition Sources

4.0″ MAK Sputter Source Flexmount (adjustable) mount

Part Number: L400A01FM

Description

Ferrotec Meivac Flexmount (+/- 45 degree angular adjustable) sputter sources are noted for simplicity, ease of use, and resulting high reliability, the MAK sputter source has been designed to present the smallest profile possible and deliver higher deposition rates than any comparable sputter sources.

Specifications

Target Diameter

4.0" (100.8mm)
Magnets

Nd/FeB
Max Dc Power

3000W
Max RF Power

1200W
Cathode Voltage (v)

200-1000
Max Discharge Current

7.0 A
Pressure Range (mtorr)

0.5 – 600
Water Flow Rate

1.0 gpm
Min CF Flange Size

8.0" CF

Dimensions

Dimension

Inches
A

Ø 4.45
B

4.6
B-2

0.66
C

Ø 2.25
D

12
D-2

4.5
E

Ø 0.75
F

2.3

Ordering

Ordering Information for Model L400A01FM

If you have questions about pricing and availability, need more information about Ferrotec’s MeiVac Vari-Q throttle valve model L400A01FM, or if you have other requirements, you can submit your request using the form or contact your Ferrotec representative directly.

Please Contact Me Regarding Ferrotec Model Number L400A01FM

Use this form to submit your L400A01FM inquiry directly to Ferrotec. If you have special requirements or need specific customizations, please include the details in your description.

  • Section 1: Contact Information

    * Indicates a required field

  • Your Request

  • MM slash DD slash YYYY

Description

Create a New Ferrotec Download Account

After registering, you will receive a temporary password via email to the address you specify. That email address will be your user name.

"*" indicates required fields

Name*
Address*
Email*