Take Control of Vacuum Pressure with Vari-Q Throttle Valves

Ferrotec’s MeiVac Vari-Q throttle valve is the best downstream pressure control valve available on the market. The unique counter-rotating vane set provides for linear control across the entire operating range of the valve. In the open position, the VQ throttle valve vanes offer little restriction in the pumping path during critical pump down operations. The counter rotated vane designs allow VQ flanges to be low profile, further minimizing conductance losses and pump stack heights. If linear control and process repeatability are important, then the MeiVac VQ throttle valve is a must for your thin film process application.

BROCHURE

Vari-Q throttle valve

Select Configuration Filters

Flange Type
Flange Material
Flange Coating
Actuation
Image Product O.D. I.D. Material/Coating Actuation
VQ-6-CF-SS-MK 5.97 Inches 3.688 Inches Stainless Steel/N/A On-valve controller View Details
VQ-6-CF-SS-PA 5.97 Inches 3.688 Inches Stainless Steel/N/A Pneumatically View Details
VQ-6-CF-SS-SM 5.97 Inches 3.688 Inches Stainless Steel/N/A Servomotor View Details
VQ-8-CF-SS-MK 7.97 Inches 5.702 Inches Stainless Steel/N/A On-valve controller View Details
VQ-8-CF-SS-PA 7.97 Inches 5.702 Inches Stainless Steel/N/A Pneumatically View Details
VQ-8-CF-SS-SM 7.97 Inches 5.702 Inches Stainless Steel/N/A Servomotor View Details
VQ-10-CF-SS-MK 9.97 Inches 6.438 Inches Stainless Steel/N/A On-valve controller View Details
VQ-10-CF-SS-PA 9.97 Inches 6.438 Inches Stainless Steel/N/A Pneumatically View Details
VQ-10-CF-SS-SM 9.97 Inches 6.438 Inches Stainless Steel/N/A Servomotor View Details
VQ-6-ASA-H-MK 11 Inches 7.376 Inches Aluminum/Hard Anodized On-valve controller View Details
VQ-6-ASA-H-PA 11 Inches 7.376 Inches Aluminum/Hard Anodized Pneumatically View Details
VQ-6-ASA-H-SM 11 Inches 7.376 Inches Aluminum/Hard Anodized Servomotor View Details
VQ-6-ASA-SS-MK 11 Inches 7.376 Inches Stainless Steel/N/A On-valve controller View Details
VQ-6-ASA-SS-PA 11 Inches 7.376 Inches Stainless Steel/N/A Pneumatically View Details
VQ-6-ASA-SS-SM 11 Inches 7.376 Inches Stainless Steel/N/A Servomotor View Details
VQ-6-ASA-U-MK 11 Inches 7.376 Inches Aluminum/Clear Alodine On-valve controller View Details
VQ-6-ASA-U-PA 11 Inches 7.376 Inches Aluminum/Clear Alodine Pneumatically View Details
VQ-6-ASA-U-SM 11 Inches 7.376 Inches Aluminum/Clear Alodine Servomotor View Details
VQ-12-CF-SS-MK 12 Inches 9.868 Inches Stainless Steel/N/A On-valve controller View Details
VQ-12-CF-SS-PA 12 Inches 9.868 Inches Stainless Steel/N/A Pneumatically View Details
VQ-12-CF-SS-SM 12 Inches 9.868 Inches Stainless Steel/N/A Servomotor View Details
VQ-8-ASA-H-MK 13.5 Inches 7.376 Inches Aluminum/Hard Anodized On-valve controller View Details
VQ-8-ASA-H-PA 13.5 Inches 7.376 Inches Aluminum/Hard Anodized Pneumatically View Details
VQ-8-ASA-H-SM 13.5 Inches 7.376 Inches Aluminum/Hard Anodized Servomotor View Details
VQ-8-ASA-SS-MK 13.5 Inches 7.376 Inches Stainless Steel/N/A On-valve controller View Details
VQ-8-ASA-SS-PA 13.5 Inches 7.376 Inches Stainless Steel/N/A Pneumatically View Details
VQ-8-ASA-SS-SM 13.5 Inches 7.376 Inches Stainless Steel/N/A Servomotor View Details
VQ-8-ASA-U-MK 13.5 Inches 7.376 Inches Aluminum/Clear Alodine On-valve controller View Details
VQ-8-ASA-U-PA 13.5 Inches 7.376 Inches Aluminum/Clear Alodine Pneumatically View Details
VQ-8-ASA-U-SM 13.5 Inches 7.376 Inches Aluminum/Clear Alodine Servomotor View Details
VQ-10-ASA-H-MK 16 Inches 11.875 Inches Aluminum/Hard Anodized On-valve controller View Details
VQ-10-ASA-H-PA 16 Inches 11.875 Inches Aluminum/Hard Anodized Pneumatically View Details
VQ-10-ASA-H-SM 16 Inches 11.875 Inches Aluminum/Hard Anodized Servomotor View Details
VQ-10-ASA-SS-MK 16 Inches 11.875 Inches Stainless Steel/N/A On-valve controller View Details
VQ-10-ASA-SS-PA 16 Inches 11.875 Inches Stainless Steel/N/A Pneumatically View Details
VQ-10-ASA-SS-SM 16 Inches 11.875 Inches Stainless Steel/N/A Servomotor View Details
VQ-10-ASA-U-MK 16 Inches 11.875 Inches Aluminum/Clear Alodine On-valve controller View Details
VQ-10-ASA-U-PA 16 Inches 11.875 Inches Aluminum/Clear Alodine Pneumatically View Details
VQ-10-ASA-U-SM 16 Inches 11.875 Inches Aluminum/Clear Alodine Servomotor View Details
VQ-16-ASA-H-MK 23.5 Inches 18 Inches Aluminum/Hard Anodized On-valve controller View Details
VQ-16-ASA-H-PA 23.5 Inches 18 Inches Aluminum/Hard Anodized Pneumatically View Details
VQ-16-ASA-H-SM 23.5 Inches 18 Inches Aluminum/Hard Anodized Servomotor View Details
VQ-16-ASA-SS-MK 23.5 Inches 18 Inches Stainless Steel/N/A On-valve controller View Details
VQ-16-ASA-SS-PA 23.5 Inches 18 Inches Stainless Steel/N/A Pneumatically View Details
VQ-16-ASA-SS-SM 23.5 Inches 18 Inches Stainless Steel/N/A Servomotor View Details
VQ-16-ASA-U-MK 23.5 Inches 18 Inches Aluminum/Clear Alodine On-valve controller View Details
VQ-16-ASA-U-PA 23.5 Inches 18 Inches Aluminum/Clear Alodine Pneumatically View Details
VQ-16-ASA-U-SM 23.5 Inches 18 Inches Aluminum/Clear Alodine Servomotor View Details
VQ-20-ASA-H-MK 27.5 Inches 21 Inches Aluminum/Hard Anodized On-valve controller View Details
VQ-20-ASA-H-PA 27.5 Inches 21 Inches Aluminum/Hard Anodized Pneumatically View Details
VQ-20-ASA-H-SM 27.5 Inches 21 Inches Aluminum/Hard Anodized Servomotor View Details
VQ-20-ASA-U-MK 27.5 Inches 21 Inches Aluminum/Clear Alodine On-valve controller View Details
VQ-20-ASA-U-PA 27.5 Inches 21 Inches Aluminum/Clear Alodine Pneumatically View Details
VQ-20-ASA-U-SM 27.5 Inches 21 Inches Aluminum/Clear Alodine Servomotor View Details
VQ-32-ASA-H-MK 38 Inches 32.12 Inches Aluminum/Hard Anodized On-valve controller View Details
VQ-32-ASA-H-PA 38 Inches 32.12 Inches Aluminum/Hard Anodized Pneumatically View Details
VQ-32-ASA-H-SM 38 Inches 32.12 Inches Aluminum/Hard Anodized Servomotor View Details
VQ-32-ASA-U-MK 38 Inches 32.12 Inches Aluminum/Clear Alodine On-valve controller View Details
VQ-32-ASA-U-PA 38 Inches 32.12 Inches Aluminum/Clear Alodine Pneumatically View Details
VQ-32-ASA-U-SM 38 Inches 32.12 Inches Aluminum/Clear Alodine Servomotor View Details
VQ-35-ASA-H-MK 41.75 Inches 35 Inches Aluminum/Hard Anodized On-valve controller View Details
VQ-35-ASA-H-PA 41.75 Inches 35 Inches Aluminum/Hard Anodized Pneumatically View Details
VQ-35-ASA-H-SM 41.75 Inches 35 Inches Aluminum/Hard Anodized Servomotor View Details
VQ-35-ASA-U-MK 41.75 Inches 35 Inches Aluminum/Clear Alodine On-valve controller View Details
VQ-35-ASA-U-PA 41.75 Inches 35 Inches Aluminum/Clear Alodine Pneumatically View Details
VQ-35-ASA-U-SM 41.75 Inches 35 Inches Aluminum/Clear Alodine Servomotor View Details
VQ-100-ISO-H-MK 165 Millimeters 102 Millimeters Aluminum/Hard Anodized On-valve controller View Details
VQ-100-ISO-H-PA 165 Millimeters 102 Millimeters Aluminum/Hard Anodized Pneumatically View Details
VQ-100-ISO-H-SM 165 Millimeters 102 Millimeters Aluminum/Hard Anodized Servomotor View Details
VQ-100-ISO-SS-MK 165 Millimeters 102 Millimeters Stainless Steel/N/A On-valve controller View Details
VQ-100-ISO-SS-PA 165 Millimeters 102 Millimeters Stainless Steel/N/A Pneumatically View Details
VQ-100-ISO-SS-SM 165 Millimeters 102 Millimeters Stainless Steel/N/A Servomotor View Details
VQ-100-ISO-U-MK 165 Millimeters 102 Millimeters Aluminum/Clear Alodine On-valve controller View Details
VQ-100-ISO-U-PA 165 Millimeters 102 Millimeters Aluminum/Clear Alodine Pneumatically View Details
VQ-100-ISO-U-SM 165 Millimeters 102 Millimeters Aluminum/Clear Alodine Servomotor View Details
VQ-100-JIS-H-MK 185 Millimeters 102 Millimeters Aluminum/Hard Anodized On-valve controller View Details
VQ-100-JIS-H-PA 185 Millimeters 102 Millimeters Aluminum/Hard Anodized Pneumatically View Details
VQ-100-JIS-H-SM 185 Millimeters 102 Millimeters Aluminum/Hard Anodized Servomotor View Details
VQ-100-JIS-SS-MK 185 Millimeters 102 Millimeters Stainless Steel/N/A On-valve controller View Details
VQ-100-JIS-SS-PA 185 Millimeters 102 Millimeters Stainless Steel/N/A Pneumatically View Details
VQ-100-JIS-SS-SM 185 Millimeters 102 Millimeters Stainless Steel/N/A Servomotor View Details
VQ-100-JIS-U-MK 185 Millimeters 102 Millimeters Aluminum/Clear Alodine On-valve controller View Details
VQ-100-JIS-U-PA 185 Millimeters 102 Millimeters Aluminum/Clear Alodine Pneumatically View Details
VQ-100-JIS-U-SM 185 Millimeters 102 Millimeters Aluminum/Clear Alodine Servomotor View Details
VQ-160-ISO-H-MK 225 Millimeters 153 Millimeters Aluminum/Hard Anodized On-valve controller View Details
VQ-160-ISO-H-PA 225 Millimeters 153 Millimeters Aluminum/Hard Anodized Pneumatically View Details
VQ-160-ISO-H-SM 225 Millimeters 153 Millimeters Aluminum/Hard Anodized Servomotor View Details
VQ-160-ISO-SS-MK 225 Millimeters 153 Millimeters Stainless Steel/N/A On-valve controller View Details
VQ-160-ISO-SS-PA 225 Millimeters 153 Millimeters Stainless Steel/N/A Pneumatically View Details
VQ-160-ISO-SS-SM 225 Millimeters 153 Millimeters Stainless Steel/N/A Servomotor View Details
VQ-160-ISO-U-MK 225 Millimeters 153 Millimeters Aluminum/Clear Alodine On-valve controller View Details
VQ-160-ISO-U-PA 225 Millimeters 153 Millimeters Aluminum/Clear Alodine Pneumatically View Details
VQ-160-ISO-U-SM 225 Millimeters 153 Millimeters Aluminum/Clear Alodine Servomotor View Details
VQ-200-ISO-H-MK 285 Millimeters 187 Millimeters Aluminum/Hard Anodized On-valve controller View Details
VQ-200-ISO-H-PA 285 Millimeters 187 Millimeters Aluminum/Hard Anodized Pneumatically View Details
VQ-200-ISO-H-SM 285 Millimeters 187 Millimeters Aluminum/Hard Anodized Servomotor View Details
VQ-200-ISO-SS-MK 285 Millimeters 187 Millimeters Stainless Steel/N/A On-valve controller View Details
VQ-200-ISO-SS-PA 285 Millimeters 187 Millimeters Stainless Steel/N/A Pneumatically View Details
VQ-200-ISO-SS-SM 285 Millimeters 187 Millimeters Stainless Steel/N/A Servomotor View Details
VQ-200-ISO-U-MK 285 Millimeters 187 Millimeters Aluminum/Clear Alodine On-valve controller View Details
VQ-200-ISO-U-PA 285 Millimeters 187 Millimeters Aluminum/Clear Alodine Pneumatically View Details
VQ-200-ISO-U-SM 285 Millimeters 187 Millimeters Aluminum/Clear Alodine Servomotor View Details
VQ-200-JIS-H-MK 300 Millimeters 187 Millimeters Aluminum/Hard Anodized On-valve controller View Details
VQ-200-JIS-H-PA 300 Millimeters 187 Millimeters Aluminum/Hard Anodized Pneumatically View Details
VQ-200-JIS-H-SM 300 Millimeters 187 Millimeters Aluminum/Hard Anodized Servomotor View Details
VQ-200-JIS-SS-MK 300 Millimeters 187 Millimeters Stainless Steel/N/A On-valve controller View Details
VQ-200-JIS-SS-PA 300 Millimeters 187 Millimeters Stainless Steel/N/A Pneumatically View Details
VQ-200-JIS-SS-SM 300 Millimeters 187 Millimeters Stainless Steel/N/A Servomotor View Details
VQ-200-JIS-U-MK 300 Millimeters 187 Millimeters Aluminum/Clear Alodine On-valve controller View Details
VQ-200-JIS-U-PA 300 Millimeters 187 Millimeters Aluminum/Clear Alodine Pneumatically View Details
VQ-200-JIS-U-SM 300 Millimeters 187 Millimeters Aluminum/Clear Alodine Servomotor View Details
VQ-250-ISO-H-MK 335 Millimeters 261 Millimeters Aluminum/Hard Anodized On-valve controller View Details
VQ-250-ISO-H-PA 335 Millimeters 261 Millimeters Aluminum/Hard Anodized Pneumatically View Details
VQ-250-ISO-H-SM 335 Millimeters 261 Millimeters Aluminum/Hard Anodized Servomotor View Details
VQ-250-ISO-SS-MK 335 Millimeters 261 Millimeters Stainless Steel/N/A On-valve controller View Details
VQ-250-ISO-SS-PA 335 Millimeters 261 Millimeters Stainless Steel/N/A Pneumatically View Details
VQ-250-ISO-SS-SM 335 Millimeters 261 Millimeters Stainless Steel/N/A Servomotor View Details
VQ-250-ISO-U-MK 335 Millimeters 261 Millimeters Aluminum/Clear Alodine On-valve controller View Details
VQ-250-ISO-U-PA 335 Millimeters 261 Millimeters Aluminum/Clear Alodine Pneumatically View Details
VQ-250-ISO-U-SM 335 Millimeters 261 Millimeters Aluminum/Clear Alodine Servomotor View Details
VQ-250-JIS-H-MK 350 Millimeters 251 Millimeters Aluminum/Hard Anodized On-valve controller View Details
VQ-250-JIS-H-PA 350 Millimeters 251 Millimeters Aluminum/Hard Anodized Pneumatically View Details
VQ-250-JIS-H-SM 350 Millimeters 251 Millimeters Aluminum/Hard Anodized Servomotor View Details
VQ-250-JIS-SS-MK 350 Millimeters 251 Millimeters Stainless Steel/N/A On-valve controller View Details
VQ-250-JIS-SS-PA 350 Millimeters 251 Millimeters Stainless Steel/N/A Pneumatically View Details
VQ-250-JIS-SS-SM 350 Millimeters 251 Millimeters Stainless Steel/N/A Servomotor View Details
VQ-250-JIS-U-MK 350 Millimeters 251 Millimeters Aluminum/Clear Alodine On-valve controller View Details
VQ-250-JIS-U-PA 350 Millimeters 251 Millimeters Aluminum/Clear Alodine Pneumatically View Details
VQ-250-JIS-U-SM 350 Millimeters 251 Millimeters Aluminum/Clear Alodine Servomotor View Details
VQ-300-JIS-H-MK 400 Millimeters 302 Millimeters Aluminum/Hard Anodized On-valve controller View Details
VQ-300-JIS-H-PA 400 Millimeters 302 Millimeters Aluminum/Hard Anodized Pneumatically View Details
VQ-300-JIS-H-SM 400 Millimeters 302 Millimeters Aluminum/Hard Anodized Servomotor View Details
VQ-300-JIS-SS-MK 400 Millimeters 302 Millimeters Stainless Steel/N/A On-valve controller View Details
VQ-300-JIS-SS-PA 400 Millimeters 302 Millimeters Stainless Steel/N/A Pneumatically View Details
VQ-300-JIS-SS-SM 400 Millimeters 302 Millimeters Stainless Steel/N/A Servomotor View Details
VQ-300-JIS-U-MK 400 Millimeters 302 Millimeters Aluminum/Clear Alodine On-valve controller View Details
VQ-300-JIS-U-PA 400 Millimeters 302 Millimeters Aluminum/Clear Alodine Pneumatically View Details
VQ-300-JIS-U-SM 400 Millimeters 302 Millimeters Aluminum/Clear Alodine Servomotor View Details
VQ-320-ISO-H-MK 510 Millimeters 400 Millimeters Aluminum/Hard Anodized On-valve controller View Details
VQ-320-ISO-H-PA 510 Millimeters 400 Millimeters Aluminum/Hard Anodized Pneumatically View Details
VQ-320-ISO-H-SM 510 Millimeters 400 Millimeters Aluminum/Hard Anodized Servomotor View Details
VQ-320-ISO-SS-MK 510 Millimeters 400 Millimeters Stainless Steel/N/A On-valve controller View Details
VQ-320-ISO-SS-PA 510 Millimeters 400 Millimeters Stainless Steel/N/A Pneumatically View Details
VQ-320-ISO-SS-SM 510 Millimeters 400 Millimeters Stainless Steel/N/A Servomotor View Details
VQ-320-ISO-U-MK 510 Millimeters 400 Millimeters Aluminum/Clear Alodine On-valve controller View Details
VQ-320-ISO-U-PA 510 Millimeters 400 Millimeters Aluminum/Clear Alodine Pneumatically View Details
VQ-320-ISO-U-SM 510 Millimeters 400 Millimeters Aluminum/Clear Alodine Servomotor View Details
VQ-400-ISO-H-MK 510 Millimeters 400 Millimeters Aluminum/Hard Anodized On-valve controller View Details
VQ-400-ISO-H-PA 510 Millimeters 400 Millimeters Aluminum/Hard Anodized Pneumatically View Details
VQ-400-ISO-H-SM 510 Millimeters 400 Millimeters Aluminum/Hard Anodized Servomotor View Details
VQ-400-ISO-U-MK 510 Millimeters 400 Millimeters Aluminum/Clear Alodine On-valve controller View Details
VQ-400-ISO-U-PA 510 Millimeters 400 Millimeters Aluminum/Clear Alodine Pneumatically View Details
VQ-400-ISO-U-SM 510 Millimeters 400 Millimeters Aluminum/Clear Alodine Servomotor View Details
VQ-400-JIS-H-MK 510 Millimeters 400 Millimeters Aluminum/Hard Anodized On-valve controller View Details
VQ-400-JIS-H-PA 510 Millimeters 400 Millimeters Aluminum/Hard Anodized Pneumatically View Details
VQ-400-JIS-H-SM 510 Millimeters 400 Millimeters Aluminum/Hard Anodized Servomotor View Details
VQ-400-JIS-U-MK 510 Millimeters 400 Millimeters Aluminum/Clear Alodine On-valve controller View Details
VQ-400-JIS-U-SM 510 Millimeters 400 Millimeters Aluminum/Clear Alodine Servomotor View Details
VQ-400-JIS-U-PA 520 Millimeters 406 Millimeters Aluminum/Clear Alodine Pneumatically View Details

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