Take Control of Vacuum Pressure with Vari-Q Throttle Valves
Ferrotec’s MeiVac Vari-Q throttle valve is the best downstream pressure control valve available on the market. The unique counter-rotating vane set provides for linear control across the entire operating range of the valve. In the open position, the VQ throttle valve vanes offer little restriction in the pumping path during critical pump down operations. The counter rotated vane designs allow VQ flanges to be low profile, further minimizing conductance losses and pump stack heights. If linear control and process repeatability are important, then the MeiVac VQ throttle valve is a must for your thin film process application.
BROCHURE
Select Configuration Filters
Image | Product | O.D. | I.D. | Material/Coating | Actuation | |
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VQ-6-CF-SS-MK | 5.97 Inches | 3.688 Inches | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-6-CF-SS-PA | 5.97 Inches | 3.688 Inches | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-6-CF-SS-SM | 5.97 Inches | 3.688 Inches | Stainless Steel/N/A | Servomotor | View Details | |
VQ-8-CF-SS-MK | 7.97 Inches | 5.702 Inches | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-8-CF-SS-PA | 7.97 Inches | 5.702 Inches | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-8-CF-SS-SM | 7.97 Inches | 5.702 Inches | Stainless Steel/N/A | Servomotor | View Details | |
VQ-10-CF-SS-MK | 9.97 Inches | 6.438 Inches | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-10-CF-SS-PA | 9.97 Inches | 6.438 Inches | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-10-CF-SS-SM | 9.97 Inches | 6.438 Inches | Stainless Steel/N/A | Servomotor | View Details | |
VQ-6-ASA-H-MK | 11 Inches | 7.376 Inches | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-6-ASA-H-PA | 11 Inches | 7.376 Inches | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-6-ASA-H-SM | 11 Inches | 7.376 Inches | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-6-ASA-SS-MK | 11 Inches | 7.376 Inches | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-6-ASA-SS-PA | 11 Inches | 7.376 Inches | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-6-ASA-SS-SM | 11 Inches | 7.376 Inches | Stainless Steel/N/A | Servomotor | View Details | |
VQ-6-ASA-U-MK | 11 Inches | 7.376 Inches | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-6-ASA-U-PA | 11 Inches | 7.376 Inches | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-6-ASA-U-SM | 11 Inches | 7.376 Inches | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-12-CF-SS-MK | 12 Inches | 9.868 Inches | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-12-CF-SS-PA | 12 Inches | 9.868 Inches | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-12-CF-SS-SM | 12 Inches | 9.868 Inches | Stainless Steel/N/A | Servomotor | View Details | |
VQ-8-ASA-H-MK | 13.5 Inches | 7.376 Inches | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-8-ASA-H-PA | 13.5 Inches | 7.376 Inches | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-8-ASA-H-SM | 13.5 Inches | 7.376 Inches | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-8-ASA-SS-MK | 13.5 Inches | 7.376 Inches | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-8-ASA-SS-PA | 13.5 Inches | 7.376 Inches | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-8-ASA-SS-SM | 13.5 Inches | 7.376 Inches | Stainless Steel/N/A | Servomotor | View Details | |
VQ-8-ASA-U-MK | 13.5 Inches | 7.376 Inches | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-8-ASA-U-PA | 13.5 Inches | 7.376 Inches | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-8-ASA-U-SM | 13.5 Inches | 7.376 Inches | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-10-ASA-H-MK | 16 Inches | 11.875 Inches | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-10-ASA-H-PA | 16 Inches | 11.875 Inches | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-10-ASA-H-SM | 16 Inches | 11.875 Inches | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-10-ASA-SS-MK | 16 Inches | 11.875 Inches | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-10-ASA-SS-PA | 16 Inches | 11.875 Inches | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-10-ASA-SS-SM | 16 Inches | 11.875 Inches | Stainless Steel/N/A | Servomotor | View Details | |
VQ-10-ASA-U-MK | 16 Inches | 11.875 Inches | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-10-ASA-U-PA | 16 Inches | 11.875 Inches | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-10-ASA-U-SM | 16 Inches | 11.875 Inches | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-16-ASA-H-MK | 23.5 Inches | 18 Inches | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-16-ASA-H-PA | 23.5 Inches | 18 Inches | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-16-ASA-H-SM | 23.5 Inches | 18 Inches | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-16-ASA-SS-MK | 23.5 Inches | 18 Inches | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-16-ASA-SS-PA | 23.5 Inches | 18 Inches | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-16-ASA-SS-SM | 23.5 Inches | 18 Inches | Stainless Steel/N/A | Servomotor | View Details | |
VQ-16-ASA-U-MK | 23.5 Inches | 18 Inches | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-16-ASA-U-PA | 23.5 Inches | 18 Inches | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-16-ASA-U-SM | 23.5 Inches | 18 Inches | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-20-ASA-H-MK | 27.5 Inches | 21 Inches | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-20-ASA-H-PA | 27.5 Inches | 21 Inches | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-20-ASA-H-SM | 27.5 Inches | 21 Inches | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-20-ASA-U-MK | 27.5 Inches | 21 Inches | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-20-ASA-U-PA | 27.5 Inches | 21 Inches | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-20-ASA-U-SM | 27.5 Inches | 21 Inches | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-32-ASA-H-MK | 38 Inches | 32.12 Inches | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-32-ASA-H-PA | 38 Inches | 32.12 Inches | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-32-ASA-H-SM | 38 Inches | 32.12 Inches | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-32-ASA-U-MK | 38 Inches | 32.12 Inches | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-32-ASA-U-PA | 38 Inches | 32.12 Inches | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-32-ASA-U-SM | 38 Inches | 32.12 Inches | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-35-ASA-H-MK | 41.75 Inches | 35 Inches | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-35-ASA-H-PA | 41.75 Inches | 35 Inches | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-35-ASA-H-SM | 41.75 Inches | 35 Inches | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-35-ASA-U-MK | 41.75 Inches | 35 Inches | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-35-ASA-U-PA | 41.75 Inches | 35 Inches | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-35-ASA-U-SM | 41.75 Inches | 35 Inches | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-100-ISO-H-MK | 165 Millimeters | 102 Millimeters | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-100-ISO-H-PA | 165 Millimeters | 102 Millimeters | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-100-ISO-H-SM | 165 Millimeters | 102 Millimeters | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-100-ISO-SS-MK | 165 Millimeters | 102 Millimeters | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-100-ISO-SS-PA | 165 Millimeters | 102 Millimeters | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-100-ISO-SS-SM | 165 Millimeters | 102 Millimeters | Stainless Steel/N/A | Servomotor | View Details | |
VQ-100-ISO-U-MK | 165 Millimeters | 102 Millimeters | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-100-ISO-U-PA | 165 Millimeters | 102 Millimeters | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-100-ISO-U-SM | 165 Millimeters | 102 Millimeters | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-100-JIS-H-MK | 185 Millimeters | 102 Millimeters | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-100-JIS-H-PA | 185 Millimeters | 102 Millimeters | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-100-JIS-H-SM | 185 Millimeters | 102 Millimeters | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-100-JIS-SS-MK | 185 Millimeters | 102 Millimeters | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-100-JIS-SS-PA | 185 Millimeters | 102 Millimeters | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-100-JIS-SS-SM | 185 Millimeters | 102 Millimeters | Stainless Steel/N/A | Servomotor | View Details | |
VQ-100-JIS-U-MK | 185 Millimeters | 102 Millimeters | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-100-JIS-U-PA | 185 Millimeters | 102 Millimeters | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-100-JIS-U-SM | 185 Millimeters | 102 Millimeters | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-160-ISO-H-MK | 225 Millimeters | 153 Millimeters | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-160-ISO-H-PA | 225 Millimeters | 153 Millimeters | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-160-ISO-H-SM | 225 Millimeters | 153 Millimeters | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-160-ISO-SS-MK | 225 Millimeters | 153 Millimeters | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-160-ISO-SS-PA | 225 Millimeters | 153 Millimeters | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-160-ISO-SS-SM | 225 Millimeters | 153 Millimeters | Stainless Steel/N/A | Servomotor | View Details | |
VQ-160-ISO-U-MK | 225 Millimeters | 153 Millimeters | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-160-ISO-U-PA | 225 Millimeters | 153 Millimeters | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-160-ISO-U-SM | 225 Millimeters | 153 Millimeters | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-200-ISO-H-MK | 285 Millimeters | 187 Millimeters | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-200-ISO-H-PA | 285 Millimeters | 187 Millimeters | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-200-ISO-H-SM | 285 Millimeters | 187 Millimeters | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-200-ISO-SS-MK | 285 Millimeters | 187 Millimeters | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-200-ISO-SS-PA | 285 Millimeters | 187 Millimeters | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-200-ISO-SS-SM | 285 Millimeters | 187 Millimeters | Stainless Steel/N/A | Servomotor | View Details | |
VQ-200-ISO-U-MK | 285 Millimeters | 187 Millimeters | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-200-ISO-U-PA | 285 Millimeters | 187 Millimeters | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-200-ISO-U-SM | 285 Millimeters | 187 Millimeters | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-200-JIS-H-MK | 300 Millimeters | 187 Millimeters | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-200-JIS-H-PA | 300 Millimeters | 187 Millimeters | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-200-JIS-H-SM | 300 Millimeters | 187 Millimeters | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-200-JIS-SS-MK | 300 Millimeters | 187 Millimeters | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-200-JIS-SS-PA | 300 Millimeters | 187 Millimeters | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-200-JIS-SS-SM | 300 Millimeters | 187 Millimeters | Stainless Steel/N/A | Servomotor | View Details | |
VQ-200-JIS-U-MK | 300 Millimeters | 187 Millimeters | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-200-JIS-U-PA | 300 Millimeters | 187 Millimeters | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-200-JIS-U-SM | 300 Millimeters | 187 Millimeters | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-250-ISO-H-MK | 335 Millimeters | 261 Millimeters | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-250-ISO-H-PA | 335 Millimeters | 261 Millimeters | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-250-ISO-H-SM | 335 Millimeters | 261 Millimeters | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-250-ISO-SS-MK | 335 Millimeters | 261 Millimeters | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-250-ISO-SS-PA | 335 Millimeters | 261 Millimeters | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-250-ISO-SS-SM | 335 Millimeters | 261 Millimeters | Stainless Steel/N/A | Servomotor | View Details | |
VQ-250-ISO-U-MK | 335 Millimeters | 261 Millimeters | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-250-ISO-U-PA | 335 Millimeters | 261 Millimeters | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-250-ISO-U-SM | 335 Millimeters | 261 Millimeters | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-250-JIS-H-MK | 350 Millimeters | 251 Millimeters | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-250-JIS-H-PA | 350 Millimeters | 251 Millimeters | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-250-JIS-H-SM | 350 Millimeters | 251 Millimeters | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-250-JIS-SS-MK | 350 Millimeters | 251 Millimeters | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-250-JIS-SS-PA | 350 Millimeters | 251 Millimeters | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-250-JIS-SS-SM | 350 Millimeters | 251 Millimeters | Stainless Steel/N/A | Servomotor | View Details | |
VQ-250-JIS-U-MK | 350 Millimeters | 251 Millimeters | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-250-JIS-U-PA | 350 Millimeters | 251 Millimeters | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-250-JIS-U-SM | 350 Millimeters | 251 Millimeters | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-300-JIS-H-MK | 400 Millimeters | 302 Millimeters | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-300-JIS-H-PA | 400 Millimeters | 302 Millimeters | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-300-JIS-H-SM | 400 Millimeters | 302 Millimeters | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-300-JIS-SS-MK | 400 Millimeters | 302 Millimeters | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-300-JIS-SS-PA | 400 Millimeters | 302 Millimeters | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-300-JIS-SS-SM | 400 Millimeters | 302 Millimeters | Stainless Steel/N/A | Servomotor | View Details | |
VQ-300-JIS-U-MK | 400 Millimeters | 302 Millimeters | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-300-JIS-U-PA | 400 Millimeters | 302 Millimeters | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-300-JIS-U-SM | 400 Millimeters | 302 Millimeters | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-320-ISO-H-MK | 510 Millimeters | 400 Millimeters | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-320-ISO-H-PA | 510 Millimeters | 400 Millimeters | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-320-ISO-H-SM | 510 Millimeters | 400 Millimeters | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-320-ISO-SS-MK | 510 Millimeters | 400 Millimeters | Stainless Steel/N/A | On-valve controller | View Details | |
VQ-320-ISO-SS-PA | 510 Millimeters | 400 Millimeters | Stainless Steel/N/A | Pneumatically | View Details | |
VQ-320-ISO-SS-SM | 510 Millimeters | 400 Millimeters | Stainless Steel/N/A | Servomotor | View Details | |
VQ-320-ISO-U-MK | 510 Millimeters | 400 Millimeters | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-320-ISO-U-PA | 510 Millimeters | 400 Millimeters | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-320-ISO-U-SM | 510 Millimeters | 400 Millimeters | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-400-ISO-H-MK | 510 Millimeters | 400 Millimeters | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-400-ISO-H-PA | 510 Millimeters | 400 Millimeters | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-400-ISO-H-SM | 510 Millimeters | 400 Millimeters | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-400-ISO-U-MK | 510 Millimeters | 400 Millimeters | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-400-ISO-U-PA | 510 Millimeters | 400 Millimeters | Aluminum/Clear Alodine | Pneumatically | View Details | |
VQ-400-ISO-U-SM | 510 Millimeters | 400 Millimeters | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-400-JIS-H-MK | 510 Millimeters | 400 Millimeters | Aluminum/Hard Anodized | On-valve controller | View Details | |
VQ-400-JIS-H-PA | 510 Millimeters | 400 Millimeters | Aluminum/Hard Anodized | Pneumatically | View Details | |
VQ-400-JIS-H-SM | 510 Millimeters | 400 Millimeters | Aluminum/Hard Anodized | Servomotor | View Details | |
VQ-400-JIS-U-MK | 510 Millimeters | 400 Millimeters | Aluminum/Clear Alodine | On-valve controller | View Details | |
VQ-400-JIS-U-SM | 510 Millimeters | 400 Millimeters | Aluminum/Clear Alodine | Servomotor | View Details | |
VQ-400-JIS-U-PA | 520 Millimeters | 406 Millimeters | Aluminum/Clear Alodine | Pneumatically | View Details |