MeiVac Sputtering Systems and Thin Film Components

Highest Performance, Highest Quality Thin Film Manufacturing Process Equipment From System to Component

Advanced High-Precision Sputtering Systems and Thin Film Components

Ferrotec’s MeiVac group is an industry leader in providing high-quality thin film manufacturing systems, components and process solutions. As a multi-faceted supplier of standard and specialty vacuum processing systems and components used in multiple high technology production and development applications, MeiVac has served markets include data storage, photonics, solar, telecom and Government/R&D, among others.

Precision Sputtering System Solutions for Thin Film Coating

Ferrotec’s MeiVac systems have been developed as a high reliability, high uptime, expandable system platform for the deposition of thin alumina gap layers.

System products

Component Solutions for Thin Film Coating

Ferrotec’s MeiVac group manufactures industry leading vacuum process components, including evaporation sources, sputter sources, substrate heaters, and throttle valves.

Component products