MeiVac R&D and Process Improvements
Whether you need a tool for a 24/7 production fab or are still in the development phase, the MeiVac team will work with your researchers and engineers to maximize the process performance of a new or existing tool.
Highlights
- Process optimization to meet your specific needs
- Higher deposition rates>
- Film thickness uniformity optimization
- Film stoichiometry uniformity control and repeatability
- Process development to address new Applications
- New materials
- New sources and/or process chamber configurations
- Process development is not just limited to MeiVac’s standard systems. Our Process team works with customers to:
- Help optimize processes on their existing tools
- Design new tools that can meet their emerging requirements
| METROLOGY TOOLS | |
| In-House Capability | Off-Site Capability |
| Nanospec Thin Film Measurement System | RBS |
| Filmetric Thin Film Analyzer | XRR |
| Woollam Ellipsometer | Tencor Flexus |
| Hitachi SEM with EDS (Energy Dispersive Spectroscopy) | |
| DekTak Profilometer | |
| Metricon Prism Coupler | |
| Optical Microscope | |
