We’re here to help
MeiVac’s Support team offers services that range from on-site installation and training to in-house product repair and refurbishment. Additionally, we design and manufacture upgrades that enhance the reliability and performance of our Products. Examples of what we have to offer include:
- Uniformity Optimization Packages
- Substrate Size Change Kits
- Substrate Cooling Packages
- RF Upgrades
- 602 System Process Chamber additions
- Control System Upgrades
- Pumping Upgrades
- SECS/GEM Tool Interface additions
- Complete System cleanings and refurbishments
- Sputter Source, Substrate Heater and Throttle Valve repair or reconditioning
For Technical Support:
Email: support@meivac.com
Phone: 408 362-1000
Fax: 408 362-1010
Contact Support
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