300W – 13.56MHz Complete RF Power Package, CE Marked

Part Number: SU-R301


The RX01 series RF power supply package is a complete 13.56MHz RF package, including generator, AT auto-matching network, MC-2 control panel along with all cables and interlock connectors. These packages are conservatively rated and are CE marked, making them suitable for global RF sputter deposition applications. All units have been tested with MAK sources and are tuned for plug and play operation.



13.56 MHz

Output Power

300 watts

Forward Power Metering

+ /-1% Full Scale, +/-1% Reading

Output Power Stability

+/0.5% Long Term, +/-1%Watt


-50 dBc

Input Power

95 – 125 VAC or 190 – 264 VAC, 47-63 Hz

Output Connector

Type “N” Female

Interface Connectors

Serial: DB-9 Female; Analog: DB-25 Female




Forced Air, 110 CFM (52 L/Sec.)


5.25 H x 9.5 W x 19 D (in.), 13.33 x 24.13 x 48.26 (cm)


27 lbs

MC-2 Control Panel Specifications

Input Power

98 – 125 / 196 -250 VAC Selectable, 47-63 Hz


3.5″ H x 9.5″ W x 12.9″D

I/O Connections

Match (DB15F), Analog (DB25F), RS232 (DB9F), Loop-Thru (DB25/M/F)

AT Match Network Specifications


300 Watts, 20 Amps @ 2.5KV pk


5″ H x 9″ W x 15″ D



Tuning Range

1.5 to 35 Ohms – 100 to +75 Ohm

RF Conn.

Input: Type “N” Female / Output: Type “HN” Female


Ordering Information for Model SU-R301

If you have questions about pricing and availability, need more information about Ferrotec’s MeiVac Vari-Q throttle valve model SU-R301, or if you have other requirements, you can submit your request using the form or contact your Ferrotec representative directly.

Please Contact Me Regarding Ferrotec Model Number SU-R301

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