Ferrotec MeiVac Power Supplies Archives

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Thin Film Coating Component Solutions

MeiVac is a leading manufacturer of vacuum process components, including evaporation sources, sputter sources, substrate heaters, and throttle valves. MeiVac thin film component products are the right choice for your process with a full range of standard and custom configurations.

PRESSURE CONTROL

Vari-Q

Throttle Valves & Accessories

The unique counter rotating vane design of the MeiVac Vari-Q throttle valve provides for superior linear control of your process pressure. These valves are highly repeatable and have proven to be a reliable component which often times will last longer than the systems where they are installed.

Products

THIN FILM SPUTTERING

MAK

Sputter Sources & Accessories

MeiVac is a leading manufacturer of planar magnetron sputter sources, offering a wide range of standard and custom sources to meet many different application requirements. We are a one-stop shop for complete sputter deposition packages.

Products

E-BEAM EVAPORATION

e-Vap®

Evaporation Sources & Accessories

Ferrotec offers a complete line of electron beam evaporation products including the MeiVac e-beam sources. From MeiVac’s miniature research sources to the compact Mighty sources, the small footprint makes them easy to integrate into just about any chamber. Ferrotec also offers a complete line of power supplies, controls and accessories, everything you need to set up your evaporation system from one source.

Products

RESISTIVE EVAPORATION

Re-Vap™

Resistive Evaporation Sources & Accessories

Re-Vap™ resistive evaporation sources are the ideal platform for your thermal evaporation tool. Stable temperatures up to 1,800˚C can be routinely reached with our selection of matched elements. These complete source kits come with everything you need to install into your system. Add a MeiVac matched power supply to complete your coating process.

Products

SUBSTRATE HEATING UP TO 950°C

HTR

Substrate Heaters & Accessories

MeiVac manufactures high-temperature resistive substrate heaters for heating samples or wafers to 950°C with superior uniformity. 2 & 3″ sample heaters and 2, 4, & 6″ wafer specific heaters are used for many deposition techniques.

Products

Digital Control Systems

Power Supplies

For MAK, e-Vap & Re-Vap sources

Ferrotec MeiVac Power Supplies are the perfect solution for modern coating systems. From DC and RF power supplies for MAK sputtering to the advanced power supplies for e-Vap and Re-Vap systems, Ferrotec power supplies are designed to match your process requirements.

Products

Monitors & Controllers

Ferrotec MeiVac offers a complete line of monitors and controls, including crystal rate monitors, crystal rate controllers, sweep controls and pocket indexers. They offer simple integration with our sources and power supplies for a complete coating package.

Products

Contact MeiVac for pricing and availability

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MeiVac Thin Film Component Products

Thin Film Coating Component Solutions

Vari-Q

MAK

e-Vap®

Re-Vap™

HTR

Power Supplies

Monitors & Controllers

Contact MeiVac for pricing and availability

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