e-Vap® Electron Beam Evaporation Components

Ferrotec’s MeiVac group offers a complete line of electron beam evaporation solutions built around our line of e-Vap® e-beam evaporation sources. Our e-beam evaporation products are some of the best performing sources in the industry. These compact sources use modular construction that is rugged yet simple to maintain. Special attention was placed on common parts throughout the product line. The same high performance emitter and magnetic system is used for fixed pocket and rotary pocket sources. You can even interchange crucible assemblies from fixed pocket to multi-pockets without replacing the source. Simple to operate and service, the e-Vap offers the best evaporation source performance on the market at an affordable price.

From the world’s most advanced magnetic systems to the latest in digital programmable supplies and controllers, our evaporation products are the right choice for your process.


e-Vap 3kW Miniature Source
Part Number
e-Vap 3KW Miniature Source (single fixed 2cc pocket)
e-Vap 3kW Mighty Source
Part Number
e-Vap 3KW Mighty Source (single fixed 7cc pocket)
e-Vap 3KW Mighty Source (single fixed 12cc pocket)
e-Vap 3KW Mighty Source (rotary 4 x 2cc pockets )

Looking for More e-Beam Options?

Ferrotec also offers large-sized e-Beam sources and a complete line of power supplies, controls and accessories, everything you need to set up your evaporation system.

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Contact MeiVac for pricing and availability

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