VQ-8-ASA Throttle Valve
Vari-Q Throttle Valve – 800 ASA Flange
MeiVac’s VQ throttle valve is the best downstream pressure control valve available on the market. The unique counter-rotating vane set provides for linear control across the entire operating range of the valve. In the open position the VQ throttle valve vanes offer little restriction in the pumping path during critical pump down operations. The counter rotated vane designs allow VQ flanges to be low profile, further minimizing conductance losses and pump stack heights. If linear control and process repeatability are important, then the MeiVac VQ throttle valve is a must for your thin film process application.
Vari-Q Throttle Valve – 800 ASA Flange
Part Number Description
P/N: VQ-8-ASA-U-PA 800 ASA aluminum flange, clear alodine coat, pneumatically actuated
P/N: VQ-8-ASA-H-PA 800 ASA aluminum flange, hard anodized coat, pneumatically actuated
P/N: VQ-8-ASA-SS-PA 800 ASA stainless steel flange, pneumatically actuated
P/N: VQ-8-ASA-U-SM 800 ASA aluminum flange, clear alodine coat, servomotor actuated
P/N: VQ-8-ASA-H-SM 800 ASA aluminum flange, hard anodized coat, servomotor actuated
P/N: VQ-8-ASA-SS-SM 800 ASA stainless steel flange,servomotor actuated
VQ Throttle Valve Dimensions -luna
Throttle valve VQ10
P/N: VQ-10-ASA-H-SM
VQ Throttle Valve Actuator Dimensions
VQ-8-ASA Dimensional Specifications
Dimension O.D. I.D T A N H D O-Ring
Inches 13.50 7.376 2.375 13.00 8 1.062 11.75 #2-272
VQ Optional Accessories
Part Number Description
P/N: SM-651C Digital controller with multiple set points
P/N: SM-2153-MK On-valve controller