3.0″ Sample Stage Substrate Heater

Part Number: SU-300-HH

Description

Ferrotec’s MeiVac 3.0″ diameter sample stage substrate heater is configured for sample applications. Like other members of the MeiVac substrate heater product line, it delivers superior uniformity and has been used for many R&D applications where reliability is critical. It is designed to operate under rigorous conditions and is both UHV and O2 compatible.

MeiVac sample substrate heaters are made of Haynes Metal and MUST be pre baked at atmosphere by the customer at or exceeding the desired operating temperature prior to use. Haynes metal heater blocks are compatible with the Silver Thermal Paste, which is sold as an accessory. MeiVac sample blocks can also be drilled and tapped for sample holding clips based on customer specification and is available at an additional charge.

Features

  • 3.0” Wafer Heater
  • Maximum Temperature 950° C
  • Oxygen Compatible
  • UHV Compatible
  • Excellent Temperature Uniformity
Dimensional Specifications
Dimension

Inches

A

Ø 3.50

B

3.83

C

2.37

D

2.62

E

1.38

Operating Specifications (example at 1 atm pressure)

Temperature Uniformity

+/- 1%

Temperature Repeatability

12˚C

Ramp Time to 600˚C

5 min.

Ramp Time to 950˚C

13 min.

Cool-down Time to Room Temp

40 min.

Max Current

9 A

Max Voltage

85V

Heater Resistance (typical)

10 ohms

Power Supply

AC/DC

Ordering

Ordering Information for Model SU-300-HH

If you have questions about pricing and availability, need more information about Ferrotec’s MeiVac Vari-Q throttle valve model SU-300-HH, or if you have other requirements, you can submit your request using the form or contact your Ferrotec representative directly.

Please Contact Me Regarding Ferrotec Model Number SU-300-HH

Use this form to submit your SU-300-HH inquiry directly to Ferrotec. If you have special requirements or need specific customizations, please include the details in your description.

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