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e-Vap 12KW Large Rotary Pocket (3x100cc pockets)

Part Number: 0406-0004-3100


Ferrotec’s MeiVac rotary pocket 3 x 100cc electron beam evaporation source model 0406-0004-3100 is part of the e-Vap XL series of e-beam sources. e-Vap XL rotary pocket electron beam evaporation sources are the perfect choice for production coating tools. The modular design makes service simple while maintaining perfect alignment every time. Advanced magnetics and high frequency sweep control provide the best material utilization in the industry. The proprietary magnetic system keeps the beam density constant throughout the evaporation process, producing extreme stability in both rate and uniformity.


Maximum Power

12kW – Crucible and material dependent

Operating Voltage

Range -6kV to -10kV

Beam Current

Zero to 1.5A

Water Flow

3.0 gpm @ 65 psi


to 2x10E-8 Torr


Ordering Information for Model 0406-0004-3100

If you have questions about pricing and availability, need more information about Ferrotec’s MeiVac Vari-Q throttle valve model 0406-0004-3100, or if you have other requirements, you can submit your request using the form or contact your Ferrotec representative directly.

Please Contact Me Regarding Ferrotec Model Number 0406-0004-3100

Use this form to submit your 0406-0004-3100 inquiry directly to Ferrotec. If you have special requirements or need specific customizations, please include the details in your description.

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