e-Vap 3KW Miniature Source (single fixed 2cc pocket)

Part Number: 0414-0004-1002


Ferrotec’s MeiVac model 0414-0004-1002 is a single fixed pocket 2cc electron beam evaporation source. e-Vap® 3kW electron beam evaporation sources are the ideal choice for research systems. The crucible size is carefully matched to the 3kW power supply to allow temperatures high enough to evaporate virtually any materials including metals, oxides, and even refractory metals. The small footprint makes them easy to integrate into just about any chamber.


Maximum Power

3kW – Crucible and material dependent

Operating Voltage

Approximate -5kV

Beam Current

Zero to 600mA

Water Flow

0.62 gpm @ 65 psi


2.75" CF


2.75″ CF flange with HV and Water feedthroughs included


UHV to 2x10E-11 Torr


Ordering Information for Model 0414-0004-1002

If you have questions about pricing and availability, need more information about Ferrotec’s MeiVac Vari-Q throttle valve model 0414-0004-1002, or if you have other requirements, you can submit your request using the form or contact your Ferrotec representative directly.

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