Deposition Rate Monitor

Part Number: 7020-0400-0

Description

Ferrotec’s MeiVac deposition rate monitor works with our deposition rate controller to enable real time measurement of film thickness. Our monitors offer shutter control and can be used to stop a film at a desired thickness. Our rate controllers can be integrated with our sweep, indexer, shutter and power supply to provide a completed automated process solution.

Sensor Packs

Low profile crystal sensor package, 2.75″ CF type flange with oscillator, cables and 10 pkg of gold 6mHz crystals — Part Number: 0495-0272-0

Low profile crystal sensor package, 1″ bolt type flange with oscillator, cables and 10 pkg of gold 6mHz crystals — Part Number: 0495-0340-0

Bakeable crystal sensor package, 2.75″ CF type flange with oscillator, cables and 10 pkg of gold 6mHz crystals — Part Number: 0495-0540-0

Other Available Configurations

Part NumberDescription
0495-0272-0Low profile crystal sensor package, 2.75″ CF type flange with oscillator, cables and 10 pkg of gold 6mHz crystals
0495-0340-0Low profile crystal sensor package, 1″ bolt type flange with oscillator, cables and 10 pkg of gold 6mHz crystals
0495-0540-0Bakeable crystal sensor package, 2.75″ CF type flange with oscillator, cables and 10 pkg of gold 6mHz crystals

Specifications

Input Power

110 VAC / 220 VAC

Rack Mount

3U x 1/2 rack

Crystal Head

Two channel 6MHz

Ordering

Ordering Information for Model 7020-0400-0

If you have questions about pricing and availability, need more information about Ferrotec’s MeiVac Vari-Q throttle valve model 7020-0400-0, or if you have other requirements, you can submit your request using the form or contact your Ferrotec representative directly.

Please Contact Me Regarding Ferrotec Model Number 7020-0400-0

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