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e-Vap 12KW UHV Linear Source (4x15cc pockets)

Part Number: 0416-5004-4015

Description

Ferrotec’s MeiVac linear array of four 15cc pockets electron beam evaporation source model 0416-5004-4015 is part of UHV Linear Source product series. e-Vap UHV linear pocket electron beam sources are the perfect choice for UHV coating tools. This source is extremely rugged with no in-vacuum bearings or sliding surfaces to bind or create particulates. Designed to withstand repeated high temperature bakeouts and extended periods under vacuum, this source offers a whole new level of reliability. Our proven advanced magnetic and high frequency sweep systems provide the best material utilization and stability in both rate and uniformity. Coupled with our extreme life filament system, the e-Vap UHV linear is the smart choice for MBE type applications.

Specifications

Maximum Power

6kW – Crucible and material dependent
Operating Voltage

Range -6kV to -10kV
Beam Current

Zero to 1A
Water Flow

3.0 gpm @ 65 psi
Vacuum

to 2x10E-11 Torr

Ordering

Ordering Information for Model 0416-5004-4015

If you have questions about pricing and availability, need more information about Ferrotec’s MeiVac Vari-Q throttle valve model 0416-5004-4015, or if you have other requirements, you can submit your request using the form or contact your Ferrotec representative directly.

Please Contact Me Regarding Ferrotec Model Number 0416-5004-4015

Use this form to submit your 0416-5004-4015 inquiry directly to Ferrotec. If you have special requirements or need specific customizations, please include the details in your description.

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