Home | Thin Film Component Products | 1.3″ MAK Sputter Source Flange mount
1.3″ MAK Sputter Source Flange mount
Part Number: L130A01CF
Description
Ferrotec Meivac Flange mount sputter sources are noted for simplicity, ease of use, and resulting high reliability, the MAK sputter source has been designed to present the smallest profile possible and deliver higher deposition rates than any comparable sputter sources.
Specifications
Target Diameter |
1.3" (33.0mm)
|
Magnets |
Nd/FeB
|
Max Dc Power |
350W
|
Max RF Power |
200W
|
Cathode Voltage (v) |
200-1000
|
Max Discharge Current |
2.0 A
|
Pressure Range (mtorr) |
0.5 – 600
|
Water Flow Rate |
0.8 gpm
|
Min CF Flange Size |
4.5" CF
|
Dimensions
Dimension |
Inches
|
A |
Ø 2.33
|
B |
3.91
|
B-2 |
0.71
|
C |
Ø 1.50
|
D |
12
|
D-2 |
4.5
|
E |
Ø 0.75
|
F |
2.3
|
Ordering
Ordering Information for Model L130A01CF
If you have questions about pricing and availability, need more information about Ferrotec’s MeiVac Vari-Q throttle valve model L130A01CF, or if you have other requirements, you can submit your request using the form or contact your Ferrotec representative directly.
Please Contact Me Regarding Ferrotec Model Number L130A01CF
Use this form to submit your L130A01CF inquiry directly to Ferrotec. If you have special requirements or need specific customizations, please include the details in your description.